Multi-axis sensor

High-speed 6D sensor

High-speed 6D sensor

Development Background
Is it possible to measure the OIS of a smartphone camera module’s sensor shift method with a single unit? This product was developed based on such a customer’s request.
The sensor shift OIS is characterized by the fact that the actuator has correction axes in the rotational direction in addition to the X-Y directions. There is an alternative method of measurement using a high-speed 5D sensor and an autocollimator, but it has problems such as requiring installation space for two units, alignment between the sensors, and management. We have solved this problem by developing a product that combines the 5-D sensor autocollimator method (tilt), triangulation method (height), and vision sensor (position) with a rotation angle detection optical system.

Features
1. Triangulation, position measurement, and 3-axis angle measurement technologies in a single sensor
2. Excellent repeatability and high precision linearity
3. Wide working distance with high workability

Product Information

Item High-speed 6D sensor
Model MS-2000
Measurement sample Dedicated targets
Working distance 90+/-0.5mm
Measurement item Tilt(θX,θY) Displacement(Z) Position(X,Y) Rotation(θ)
Measurement area +/-60min* +/-1mm +/-0.5mm +/-90min
Source 660+/-10nm
Beam diameter φ3mm
Size(Without protrusions) W250 D150 H58mm

*Circular range.

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