Posture non-contact monitoring of semiconductor wafers, handlers, and carriers from a distance

・Issues

As equipment becomes larger and the range of movement of the equipment becomes larger, even if various measurements are necessary, there are no measuring instruments available due to working istance requirements and other factors. Do you have any?

・解決

Tilt sensors are effective for angular measurement with high accuracy and speed, even from distant locations.High-precision measurement that cannot be achieved with a displacement transducer is possible. It also reduces maintenance costs.。