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Semiconductor
Semiconductor
Two autocollimators are used to measure the parallelism of the measured object
Semiconductor
Optical parts
Parallelism
Two autocollimators are used to measure the squareness of the measured object
Semiconductor
Optical parts
Squareness
Confirmation of parallelism between die collet and reference plane
Semiconductor
Semiconductor chip
Parallelism
Optical axis adjustment of semiconductor wafer projection (exposure) lens block
Semiconductor
Photomask
Lens
Optical axis
Semiconductor exposure equipment
Non-contact angle confirmation of ellipsometer measuring object
Semiconductor
Ellipsometer
Semiconductor wafer
Embedded
Posture non-contact monitoring of semiconductor wafers, handlers, and carriers from a distance
Semiconductor
Wafer handler
Semiconductor wafer
Non-contact measurement of semiconductor wafer tilt and blur during spin-coating
Semiconductor
Spin coater
Semiconductor wafer
Non-contact measurement of semiconductor wafer shape(warpage) after cutting and polishing
Semiconductor
Semiconductor wafer
Warping
Non-contact warpage measurement of semiconductor wafers in thermostatic chambers and vacuum chambers
Semiconductor
Semiconductor wafer
Warping
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