Angle measurement during MEMS mirror tilt operation

・Issues

Is there a simple, non-contact way to evaluate objects with mirrors that tilt repeatedly, such as MEMS mirrors?

・Solutions

Measure the angle between the origin and both ends using a wide-angle tilt sensor or multiple tilt sensors. Capable of measuring the movable range of tilt of optical components, blurring of non-movable axes, and repeatability when stopped. Non-contact measurement without any load on the object. Tilt sensor enables precise angle measurement regardless of the size of the object.