Non-contact aging monitoring of the slider section of wafer handlers

１.Issues

・We want to numerically manage the aging of the slider section of the wafer handler.

2.Solutions

・When the wafer handler is in operation, the tilt sensor measures the angle of each part. Health onitoring of the equipment makes changes in the equipment visible at a glance. Yield improvement is possible.
Non-contact angle measurement with a tilt sensor prevents equipment crashes due to aging deterioration of the slider mechanism.Reduces time and labor for repairs, etc.