Non-contact warpage measurement of semiconductor wafers in thermostatic chambers and vacuum chambers

・Issues

We want to check the quality of warpage of semiconductor wafers, etc. in a closed environment such as a thermostatic chamber or vacuum chamber with glass, etc. Since we cannot modify the equipment, we are at a loss as to how to measure the quality.

・Solutions

Non-contact measurement of warpage of semiconductor wafers in thermostatic chambers and vacuum chambers with a tilt sensor through the chamber window. Measurement is possible without troublesome equipment modification or sensor setup.