Two autocollimators are used to measure the squareness of the measured object

・Issues

Squareness is important for semiconductor devices such as silicon photonics.Is there an easy and fast way to measure squareness?

・Solutions

Two tilt sensors and a squareness master make it easy to measure squareness. The tilt sensor is equipped with a high-intensity LD and a high-sensitivity light-receiving part, enabling measurement of even small objects with low reflectance. This enables non-contact measurement and reduces takt time.