Two autocollimators are used to measure the parallelism of the measured object

・Issues

Parallelism is an important factor in semiconductor devices such as silicon photonics.Is there an easy way to measure parallelism?

・Solutions

Two tilt sensors and a parallelism master allow easy, non-contact measurement of parallelism. The tilt sensor, equipped with a high-intensity LD and a high-sensitivity light-receiving part, can measure even small, low-reflectance objects. This enables numerical control, which is expected to reduce takt time and maintenance costs.