Multi-axis sensor

High-speed 5D sensor

High-speed 5D sensor

Development Background
Is it possible to measure the OIS lens actuator of a smartphone camera with a single unit? We developed this system based on such a customer’s request.
The conventional method was to measure X, Y, and Z with three laser displacement meters each and tilt with one autocollimator, but this method required space for four sensors, alignment between sensors, and management of the sensors. We have solved this problem by developing a product that combines the autocollimator method (tilt), the triangulation method (height), and a vision sensor (position).
Features
1. Triangulation, position measurement, and angle measurement technologies in a single sensor
2. Excellent repeatability and high precision linearity
3. Wide working distance with high workability

Product Information

Model MF-5550-0002 MF-5570-0002
Measurement sample φ2.9mm Optical mirror(FH-2304*1)
Working distance 80±0.5mm
Measurement type Tilt(θX, θY) Displacement(Z) Position(X, Y) Tilt(θX, θY) Displacement(Z) Position(X, Y)
Measurement area +/-60min*2 +/-1mm +/-0.5mm +/-60min*2 +/-1mm +/-0.7mm
Source
Wavelength / Beam diameter
658+/-10nm / φ0.3mm(Displacement, Tilt)
658+/-10nm / φ5mm(Position)
Output rate 10,000 times/sec
Size(Without protrusions) W185 D220 H56mm

*1. Only reflected light from the target mirror is received by the sensor, so there must be no reflection from the φ7mm area aroundthe target mirror. FH-2304 (reflectance 80% or higher, size φ2.9 mm, thickness 0.3 mm ±0.05 mm, parallelism within 30 seconds).
*2. Circular range.

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