Development Background
Is it possible to simultaneously measure displacement in addition to tilt measurement using the autocollimator method? The displacement tilt sensor was developed in response to such customer requests.
We have developed an easy-to-use product by integrating the sensor head and processor unit into a single unit, making it lighter and smaller, and simplifying its integration into equipment.
Features
1. Triangulation and autocollimator measurement methods in one
2. Integrated sensor and processor for even faster measurements (1K data/s)
3. Simultaneous measurement of displacement and inclination [Patent No. 5330114].
Product Information
| Item | Integrated displacement tilt sensor | ||||
| Model | SH-3100 | SH-3200 | |||
| Measurement sample | Optical plane（reflectance 80% more） | ||||
| Working distance | 50+/-0.5mm | ||||
| Measurement item | Tilt（ΘX,ΘY） | Displacement（Z） | Tilt（ΘX,ΘY） | Displacement（Z） | |
| Measurement area | +/-60min*1 | +/-1.5mm | +/-90min*1 | +/-5mm | |
| Repeatability*2 | 0.009min | 0.15μm | 0.009min | 0.5μm | |
| Linearity*3 | +/-0.2% of F.S. （+/-0.24min equates） |
+/-0.075% of F.S. （+/-2.25μm equates） |
+/-0.2% of F.S. （+/-0.36min equates） |
+/-0.1% of F.S. （+/-10μm equates） |
|
| Source
Wavelength/Beam diameter |
660+/-10nm / φ0.2mm or less | ||||
| Output rate | 1,000 times/sec | ||||
| Size（Without protrusions） | W100 D80 H35mm | ||||
*1. Circular range.
*2. Our standard sample use and setting on WD, 6σ when measured at rest. Measurement conditions: Average of 16 times.
*3. The error against the ideal straight line when measuring a our standard sample. Measured values may vary depending on the object to be measured.
