This is a follow-up report of the thickness measurement sensor under development introduced in "0037_[New] Thickness Measurement Sensor".
We are pleased to report that a demonstration unit has been completed.
<Features＞
Calibration to the origin (thickness 0μm) is possible in the sensor.
The sensor is very compact (W100×D120×H200 (mm)) and can be placed anywhere. It can be placed anywhere.
For details, please refer to the following document.
Thickness Measurement Sensor Documentation
Thickness Measurement Sensor_Picture
If you have any interest in this product, please contact us from the following link.
Transmission wavefront aberration interferometer has been developed and a demonstration unit has been created.
It is possible to directly measure aberrations of non-focusing lenses, group lenses, etc., which could not be measured with conventional equipment.
It is possible to measure semi-finished lenses and group lenses in the lens manufacturing process.
→This contributes to yield improvement and efficient production line operation.
No high-precision reference spherical surface or conversion lens is required for measurement.
For details, please refer to the following documents.
This product is a Laser Autocollimetor with excellent performance of 1,000mm±150mm working distance (WD).It can also measure with a working distance of up to 10m.
It can also measure with a working distance of up to 10m.
The combination of the optical system and signal processing part enables simultaneous high-speed measurement of tilt (θX, θY) (1,600 times/second) with this single solution.
Special note should be made of its long working distance, which allows tilt measurements to be placed on the floor or ceiling of the equipment in which it is to be installed. This characteristic allows for installation in equipment, as well as inspection and adjustment of long-distance moving mechanisms and evaluation equipment for long-distance sensing devices.
This solution is also designed for easy installation.
For more information, please see this video.
0039_[New] Displacement tilt sensor integrating optical system and signal processing unit
Our latest displacement tilt sensor is the product of our cutting-edge technology.
This product boasts outstanding performance thanks to the complete integration of the optical system and signal processing part. One of its remarkable features is its ability to measure tilt (θX, θY) displacement (Z) at high speed and simultaneously.
Data can be measured in real time at an impressive rate of 1,000 cycles/second.
This displacement-tilt sensor will be a revolutionary advance in the industry. Its integrated technology enables 3-axis measurement in a single solution, increasing productivity and accuracy.
Its high-speed measurement minimizes process downtime and supports efficient operations.
For more information, please refer to the following documents
0038_[New] Tilt sensor (autocollimator) with integrated optics and signal processing unit
This product is an integrated optical sensor with a signal processor built into the housing. Since the measured values are output from the main body of the optical sensor, it takes up less space and allows for a greater flexibility in the installation of equipment.
For example, it can be used to prevent crashes during semiconductor wafer handling and to monitor wafer warpage.
Compared to conventional integrated tilt sensors, the new product is smaller in size and achieves a high measurement speed of 1,600 times/second.
For details, please refer to the following document.
In addition to this product, we are developing many other inspection and measurement devices for semiconductors.
Please refer to the application examples below.
Demonstration machine of thickness measurement sensor has been completed.
This product is a revolution in non-contact measurement. It will revolutionize the manufacturing process by quickly and accurately measuring the thickness of glass, parallel plates, semiconductor wafers, thin film resist, films used for patterning, light-sensitive films, transparent conductive films, barrier films, and more.Easy operation and error-free thickness measurement. Using the latest technology, this sensor is a completely different product from conventional contact micrometers. Maximize the efficiency of your production line, R&D, and quality control.
●The data of the thickness measurement sensor is
Click here↓
Please feel free to contact us if you have any questions about measurement or inspection in the semiconductor manufacturing process.
We are looking forward to hearing from you.
Autocollimator is a kind of optical measurement sensor, a solution mainly available for adjustment and evaluation of optical systems.
It enables non-contact tilt measurement simply by pointing the measurement light on the object to be measured.
This solution enables optimization of optical equipment by accurately measuring and adjusting the optical axis and optical path of optical systems.
In particular, it is used to precisely adjust the position and tilt of lenses, mirrors, and other optical elements.
Autocollimators have long been used in the optical industry.
This product used a low-intensity halogen lamp.
Because of the low intensity of the light source, large diameter lenses were required to bring in a large amount of light into the device.
Therefore, the device was huge and heavy.
We have realized a compact, high-sensitivity, high-speed autocollimator by using a semiconductor laser as the light source and a semiconductor sensor as the detector.
Our autocollimator (product name: ultra-compact tilt sensor. Our autocollimator (product name: ultra-compact tilt sensor, model: TM-2070) uses a high-brightness laser diode and compact optical components.
It can measure low reflection objects and minute objects that conventional autocollimators could not handle.
Furthermore, by receiving light with a CMOS camera, image processing is possible and numerical control of measurement data is possible.
Please dispel the image of autocollimators as large and heavy.
Try our ultra-compact tilt sensor TM-2070.
We have a demo unit ready and waiting for your contact.
For more information, please contact us from the following link.
0034_Ultra-small size tilt sensor (autocollimator)_Long working distance measurement
Our ultra-compact tilt sensor (autocollimator) is characterized by its extremely compact size.
The normal working distance (WD: Working Distance) is 0~110mm (±70min. range).
However, WD exceeding 110mm may also be used. For applications such as optical axis alignment, there are cases where the working distance is longer than 500mm.
In order to meet the demand for products with even longer working distances, we have also developed a long WD tilt sensor (autocollimator).
Working distance: 1000 mm or longer (can also be used at 10 m or longer)
Measuring range: ±0.25deg (±15min, circular range)
Repeatability (resolution): about 0.1min
For more information, please contact us from the following link.
0033_Ultra-small tilt sensor (autocollimator)_Optimization of wavelength
We also offer tilt sensors (laser autocollimators) that change the wavelength of the built-in semiconductor laser.
This is very useful when measuring objects that reflect or transmit only at specific wavelengths.
If you have any questions about the TM-2070's ability to measure objects with wavelength characteristics, please contact us at the following address.Please contact us from the following link.
